Ex Parte YIEH et al - Page 5



          Appeal No. 2000-0037                                                        
          Application 08/627,631                                                      
                                       OPINION                                        
               After a thorough review of the claims before us                        
          considered in light of appellants' disclosure, the prior art of             
          record in the prosecution history and the respective positions of           
          both the appellants and the examiner, we conclude that                      
          considerable speculation as to the meaning of the claimed method            
          and the scope of the claims was engaged in by both the appellants           
          and the examiner. Accordingly, we take the unusual step of                  
          summarily reversing the examiner's rejection and entering the               
          following new ground of rejection, because the rejection was                
          improperly founded on speculation and assumptions by both the               
          appellants and the examiner. Compare In re Steele, 305 F.2d 859,            
          134 USPQ 292 (CCPA 1962).                                                   
                               NEW GROUND OF REJECTION                                
               Pursuant to our authority under 37 C.F.R. § 1.196(b), we               
          enter the following new ground of rejection. Claims 1 through 36            
          are rejected under 35 U.S.C. 112, second paragraph.                         
               Claim 1 is directed to a method for forming a dielectric               
          film on a substrate. According to the language recited in the               
          preamble of claim 1, the claimed method "produces less                      
          contamination in a substrate processing system" than would be               
          formed "under substantially identical processing conditions" but            
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