The opinion in support of the decision being entered today was not written
for publication and is not binding precedent of the Board.
Paper No. 15
UNITED STATES PATENT AND TRADEMARK OFFICE
____________
BEFORE THE BOARD OF PATENT APPEALS
AND INTERFERENCES
____________
Ex parte GAYLE W. MILLER
and GAIL D. SHELTON
____________
Appeal No. 2001-1064
Application No. 09/164,069
____________
ON BRIEF
____________
Before FLEMING, RUGGIERO, and GROSS, Administrative Patent Judges.
RUGGIERO, Administrative Patent Judge.
DECISION ON APPEAL
This is a decision on the appeal from the final rejection of
claims 6-17, which are all of the claims pending in the present
application. Claims 1-5 have been canceled.
The disclosed invention relates to a dielectric layer formed
within a semiconductor structure in which a layer of silica
precursor material is initially deposited on a silicon substrate.
The layer of silica precursor material is then dried and becomes a
porous silica film. A protective layer, such as parylene, is
formed on top of the dried porous silica film resulting in a
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