Appeal No. 2004-0999
Application No. 09/997,086
Rejection of Claims 2 and 10
Dependent claims 2 and 10 are rejected under 35 U.S.C. § 103
as being obvious over Ibnabdeljalil in view of Mori and further
in view of Kroeninger. We find that Kroeninger teaches the use
of laser cutting to form trenches as Examiner pointed out on page
7 of the answer. However, Kroeninger does not teach the forming
at least one trench through an interconnect layer as Appellants
defined. Therefore, we will not sustain the rejection of claims
2 and 10.
Rejection of Claims 4 and 12
Dependent claims 4 and 12 are rejected under 35 U.S.C. § 103
as being obvious over Ibnabdeljalil in view of Mori and further
in view of Wolf. We find that Wolf teaches plasma etching to
form trenches as Examiner pointed out on page 8 of the answer.
However, Wolf does not teach the forming at least one trench
through an interconnect layer as Appellants defined. Therefore,
we will not sustain the rejection of these claims 4 and 12.
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