Appeal No. 2004-1123
Application No. 09/933,503
controlling a relative humidity in the cavity of a SMIF pod to be
less than 30%, i.e., to have a relative humidity level of about
0.1% or less (col. 6, lines 33-37). Although Roberson uses a
desiccator (20) located outside the SMIF pod to dry the purge
gases prior to their entry into the pod, this patent nonetheless
instructs those in the art that levels of contaminants such a
water vapor, oxygen and particulates in a SMIF pod should be
maintained at desired levels of 0.1% or less.
Regarding appellants' argument (brief, pages 7-8) concerning
the liners of Parikh and their use in Baseman, we agree with the
examiner that there is ample suggestion in Parikh for using
liners like those seen at (e.g., 202, 204 or 350, 352) of Parikh
in the SMIF pod of Baseman to substantially seal the interior of
the cassette carrying portion of the pod from the surrounding
environment outside the pod so as to preclude contamination from
entering the interior space where the semiconductor wafers are
stored and thus better protect the wafers. Moreover, we see
nothing in appellants' specification or claims that in any way
precludes the liners described therein from being replaceable if
ultimately contaminated, as taught in Parikh. Following the
teachings of Baseman and Brooks, it is clear to us that the vapor
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