Appeal 2007-0949
Application 10/081,312
INTRODUCTION
Appellants claim a method of forming a coated part that reduces
corrosion of the coated part (claim 1). The method includes coating a
component part with magnesium fluoride such that the magnesium fluoride
coating has a density of at least about 85% and a purity of at least about 99%
(claim 1). The coated part finds particular use in a corrosive environment,
such as found in semiconductor wafer processing (Specification ¶ [0002]).
Claims 1, 2, 9 and 14 are illustrative:
1. A method of forming a coated part, comprising the step of:
coating a component part with magnesium fluoride; wherein said
magnesium fluoride coating has a density of at least about 85% and a purity
of at least about 99%, and said coating reduces corrosion of said component
part upon exposure to a corrosive environment.
2. The method of claim 1, wherein said magnesium fluoride coating has
a density of between about 85-90%.
9. The method of claim 2, further comprising the step of annealing said
coating at a temperature of at least about 600°C.
14. The method of claim 12, wherein the coating step is performed in an
inert atmosphere.
The Examiner relies on the following prior art references as evidence
of unpatentability:
Tomita US 4,637,684 Jan. 20, 1987
Kubota US 5,643,483 Jul. 1, 1997
Toyoda (as translated) JP 9-328382 Dec. 22, 1997
Kawamata US 5,958,155 Sep. 28, 1999
Ohashi US 6,139,983 Oct. 31, 2000
Morton US 6,162,495 Dec. 19, 2000
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