Appeal 2007-1170
Application 10/971,698
source by placing a baffle between the source and the exit aperture
(Specification at 3:1-9); by placing the substrate as close as possible to the
source material (id. at 4:18-20); or by using only the central portion of the
evaporated material (id. at 4:23-29).
4. According to the Specification, the prior art equipment and methods
are inefficient in that they require a significant excess of substrate, vaporized
material, and heating. (Specification at 4:26–29.)
5. Thus, the Specification discloses an apparatus intended to overcome
the prior art deficiencies, especially the inefficient use of material and
power. (Specification at 5:2–6.)
3
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