Appeal 2007-1170
Application 10/971,698
29. As seen in Figure 16, shown below,
{Freeman 013 Figure 16 is said to depict the normalized deposition rate of
Examples 1–3.}
the deposition rates are more uniform across the sample in Example 3 than
across the samples in Comparative Examples 1 and 2.
30. According to the Freeman 013, "the uniformity over the central
300 mm portion, the region that the source was designed for, is extremely
good." (Freeman 013 at 28:30-31.)
31. In Example 4, the powder charge was "substantially distributed
towards one end wall of the container." (Freeman 013 at 27:20-23.)
32. Figure 17 shows that the normalized deposition rate for Example 4 is
similar to that for Example 3, i.e., the trace labeled "3" in Figure 16.
33. According to the Freeman 013:
the findings of Example 4 appear to support the belief that a
vapor cloud VC is formed uniformly throughout the space
between the baffle member 50 and the container 30 wherein the
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