Appeal 2007-1170
Application 10/971,698
20. In the examples, the baffle is spaced 2 mm from the cover, and the
baffle has a length of 478 mm and a width of 25 mm, resulting in a volume
of 23.9 cm3 between the baffle and the heater cover. (Specification
at 14:18–20.)
21. The ratio of the internal volume of the container to the volume
between the baffle and the cover (neglecting the volume of the baffle and
supports) is said to be 34.5:1. (Specification at 14:21–22.)
22. In this example, the interior length of the container is about 1.05× the
length of the baffle, and the interior width of the container is about 1.8× the
width of the baffle.
23. The Specification concludes with two "Comparative Examples" and
three Examples, with graphs (Figures 16 and 17) of "normalized deposition
rates" as measured by the sensors 501 to 508 shown in Figure 15.
24. As these Examples appear to be the same as the Examples in
Freeman 013, we shall describe them in the context of that disclosure, infra.
25. Claim 1 reads:
A container for vaporizing a solid material to form a layer on a
surface of a structure in a chamber, comprising:
a housing for receiving the solid material to be vaporized,
the housing including at least side walls, a bottom wall,
and a cover enclosing an interior volume of the housing,
the cover including a plurality of apertures
arranged to permit egress of vapor efflux of
vaporized material from the housing;
a heater for heating at least a portion of the housing to
vaporize the solid material; and
7
Page: Previous 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Next
Last modified: September 9, 2013