Appeal 2007-2510
Application 10/389,456
1 Figures 16 and 17 are shown below:
2
3 {Figures 16 and 17 are said to depict two stages of the claimed process.}2
4 Layer 122, which represents a barrier ("hard mask") layer, is preferably
5 made of silicon nitride, which helps maintain the integrity of apertures 134
6 and the trenches through the processing steps. (Specification at 18, ¶ 70, and
7 at 11, ¶ 45.) The apertures, which expose the areas for trenches, are created
8 via exposure through a mask followed by etching. We need not describe the
9 remaining layers as they are not recited in the claims and are not argued in
10 the discussions between the Examiner and Wang.
2 The text in curly braces following the Figures is provided to ensure
compliance with section 508 of the U.S. Rehabilitation Act for publication
of this Decision on the USPTO website pursuant to the Freedom of
Information Act. It is not part of the Decision.
4
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