Appeal 2007-4189
Application 10/164,986
Appellants’ invention relates to a composite shadow ring for use in a
plasma etch chamber that is constructed of an upper ring and a lower ring
assembled together with dowel pins. Claims 1 and 21 are illustrative:
1. A composite shadow ring comprising:
a first ring having a first outside diameter, a planar top surface and a
planar bottom surface parallel to the planar top surface, said planar bottom
surface having at least two blind holes therein;
a second ring having a second outside diameter substantially similar to
said first outside diameter, a planar top surface and a planar bottom surface
parallel to said planar top surface, said planar top surface having at least two
blind holes therein; and
at least two dowel pins connecting said first and second ring together
by frictionally engaging said at least two blind holes in said first ring and
said at least two blind holes in said second ring with said bottom planar
surface of the first ring abutting said top planar surface of the second ring
wherein said at least two dowel pins are each formed of injection molded
plastic.
21. A composite shadow ring comprising:
a first ring having a first outside diameter, a planar top surface and a
planar bottom surface parallel to the planar top surface, said planar bottom
surface having at least two blind holes therein;
a second ring having a second outside diameter substantially similar to
said first outside diameter, a planar top surface and a planar bottom surface
parallel to said planar top surface, said planar top surface having at least two
blind holes therein;
at least two dowel pins connecting said first and second ring together
by frictionally engaging said at least two blind holes in said first ring and
said at least two blind holes in said second ring with said bottom planar
surface of the first ring abutting said top planar surface of the second ring;
and
an insert ring situated inside and abutting an inside peripheral surface
of said first and second ring.
2
Page: Previous 1 2 3 4 5 6 7 8 Next
Last modified: September 9, 2013