Appeal No. 95-2347 Page 2
Application No. 07/928,642
DECISION ON APPEAL
This is an appeal under 35 U.S.C. § 134 from the
examiner’s refusal to allow claims 5 and 6 as amended after
the final rejection (see the amendment filed January 24, 1994,
and the advisory action dated February 3, 1994). Claims 7,
22, and 54-56, which are the only other claims remaining (non-
canceled) in this application, have been indicated as
allowable by the examiner.
BACKGROUND
The appellants' invention relates to a reactor for
processing wafers for use as semiconductor elements. An
understanding of the invention can be derived from a reading
of exemplary claim 5, which is reproduced below.
5. A semiconductor processing reactor comprising:
a housing defining a chamber therein including an inlet
gas manifold oriented horizontally for supplying reactant
gases to process a wafer within the chamber and beneath said
manifold; the housing further including
a susceptor for supporting a wafer;
susceptor support means for holding the susceptor in a
horizontal orientation;
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