Ex parte WANG et al. - Page 10




          Appeal No. 95-2347                                        Page 10           
          Application No. 07/928,642                                                  


          for circulating a cooling medium to control the gas                         
          manifold/electrode temperature.                                             
               In our view, the provision of passageways for circulating              
          a cooling fluid in the gas manifold/electrode (12) of Shibata               
          would have been obvious to one of ordinary skill in the art to              
          prevent excess temperatures from developing in the                          
          electrode/gas manifold of Shibata.  Moreover, we agree with                 
          the examiner's conclusions (answer, pages 5-7), for reasons                 
          similar to those discussed above with regard to the rejection               
          over Chen, that the claimed functional use limitations                      
          regarding the relative temperatures of the gas manifold                     
          surfaces do not serve to patentably distinguish the underlying              
          claimed structure from that of the applied prior art.  Thus,                
          based on the present record, we agree with the examiner's                   
          conclusion that the claimed apparatus would have been obvious               
          to one of ordinary skill in the art from the combined                       
          reference teachings.                                                        
               Appellants argue that the reference (Shibata) "does not                
          disclose any non-plasma reactor at all" (brief, page 7).  We                
          find this argument unconvincing.  We note that Shibata                      
          discloses use of a plasma generation means (10) in reaction                 







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