Appeal No. 96-1848
Application 08/161,604
we agree with the examiner that Turner teaches a series of
dielectric layers.
The examiner finds that Turner teaches in figure 13
that the interconnection layers 78 are non-overlapping on
the top and bottom sides with the tungsten plugs because the
contact openings 70 are shown extending past the layers 78
(EA4-5). Appellants argue that Turner does not teach an
interconnect layer disposed in a non-overlapping
configuration on at least one side of the contact because
figure 12 shows that the upper part of the tungsten
contact 76 is entirely covered by the interconnect layer 78
in both directions ((Br10-11). We agree with appellants
that figure 12 of Turner plainly shows the tungsten contact
overlapped by the layer 78 in both directions. Figure 13
may show the width of the contact opening as slightly
greater than the width of the interconnection line 78;
however, it does not depict the width of the sidewall
nitride layer 74 which surrounds the contact 76. Since the
examiner has not added any other evidence or reasoning, the
rejection of claims 31, 32, 35, and 36 over Turner alone is
reversed.
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