Appeal No. 1998-2948
Application 08/400,861
This is a decision on appeal under 35 U.S.C. § 134 from
the final rejection of claims 1-6.
We affirm.
BACKGROUND
The invention relates to a method of manufacturing an
active matrix liquid crystal display (LCD) which comprises, in
part, anodic-oxidizing part or all of an
interconnect/electrode film formed of an aluminum alloy
containing at least one rare earth element and having a
thickness of 200 Å or more.
Claim 1 is reproduced below.
1. A method of manufacturing an active matrix
liquid crystal display having an interconnect film and a
switching element, comprising:
forming an interconnect/electrode film on a
substrate by physical vapor deposition;
patterning said interconnect/electrode film; and
anodic-oxidizing part or all of said
interconnect/electrode film;
wherein said interconnect/electrode film is formed
of an Al alloy containing at least one element selected
from the group consisting of rare earth elements in an
amount of 0.1 to 10 at%; and
the thickness of said anodic oxidation film is in
the range of 200Å or more.
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