Appeal No. 2001-2544
Application No. 08/995,108
The References
In rejecting the claims under 35 U.S.C. § 103(a), the
examiner relies upon the following references:
Hoshino 4,985,750 Jan. 15, 1991
Gelatos et al. (Gelatos) 5,391,517 Feb. 21, 1995
Landers et al. (Landers) 5,676,587 Oct. 14, 1997
Ngan 5,707,498 Jan. 13, 1998
(filed Jul. 12, 1996)
The Rejections
Claims 8-17 stand rejected under 35 U.S.C. § 103(a) as being
unpatentable over Gelatos in view of Landers.
Claims 8-17 and 21-26 stand rejected under 35 U.S.C. §103(a)
as being unpatentable over Hoshino in view of Landers.
Claims 18-20 stand rejected under 35 U.S.C. §103(a) as being
unpatentable over Gelatos in view of Landers for claims 8-17, and
further in view of Ngan.
Claims 18-20 and 27 stand rejected under 35 U.S.C. §103(a)
as being unpatentable over Hoshino in view of Landers for claims
8-17, and further in view of Ngan.
The Invention
The invention relates to a TaNx/Ta barrier/wetting layer
which increases the degree of crystal orientation in an overlying
copper layer, thereby providing greater electromigration
resistance of the copper (Specification, page 1, lines 5-7).
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