Appeal No. 1999-1066
Application No. 08/756,440
wherein each R3 is independently a tetravalent carbocyclic aromatic group, a
heterocyclic group, an alicyclic group or an aliphatic group;
each R5 is independently a divalent aliphatic group having 2 or more
carbon atoms, an alicyclic group, an aromatic aliphatic group, a carbocyclic
aromatic group, a heterocyclic group or a polysiloxane group;
R6 is an alkyl group having 1 to 7 carbon atoms; and wherein, upon
exposure of said composition to light, the acid generating compound generates
acid, which causes a silane at the end of at least one polyimide precursor to
undergo a siloxane condensation reaction and a subsequent intermolecular
cross-linking reaction with another silane.
5
Page: Previous 1 2 3 4 5 6 7 8 9 10 11 12 13 14
Last modified: November 3, 2007