Appeal No. 2003-2107
Application No. 09/429,283
high amounts of nitrogen for both the PMOSFET and the NMOSFET.
Accordingly, Kuroi does not teach or suggest that the amounts of
nitrogen should be different for the two MOSFETs. Further, Kuroi
does not disclose any other impurities for both transistors.
As indicated supra, the examiner includes no explanation as
to the relevance of Sze. Further, we find nothing in Sze
regarding concentrations of nitrogen (or other impurities) in
PMOSFETs and NMOSFETs. Therefore, none of the references teaches
or suggests implanting nitrogen (or another impurity) in both a
PMOSFET and also an NMOSFET, but with different concentrations.
Consequently, the examiner has failed to establish a prima facie
case of obviousness, and we cannot sustain the rejection of
claims 14 through 27.
CONCLUSION
8
Page: Previous 1 2 3 4 5 6 7 8 9 10 Next
Last modified: November 3, 2007