Appeal No. 2006-2344
Application No. 10/408,890
interpretation...will normally control the remainder of the decisional process.” Panduit Corp. v.
Dennison Mfg., 810 F.2d 1561, 1567-68, 1 USPQ2d 1593, 1597 (Fed. Cir. 1987).
We note that representative claim 1 reads in part as follows:
[A] measuring table that has a wafer table equipped with a rotary drive, wherein the
wafer table is cup-shaped and has at least one support edge for a wafer, which is
provided with an adhesive material, wherein in an interior of the wafer table a wafer
alignment device is arranged, and wherein over the wafer table, a displaceable
measuring head is arranged in which a measuring device and a notch detector are
integrated.
We note that at pages 7 and 8, Appellants’ specification states the following:
FIG 1 is a top view of a measurement module 1 comprising a measuring table 2 and a
measuring head 7. The measuring table 2 - as shown in FIG 2 - has a base plate 8
carrying a rotary motor 11 with a wafer table 10 on which a wafer 4 is placed. The
wafer 4 has a notch 5 and during the measurement is rotated in the direction of the
arrow by means of the wafer table 10 (see FIG 1).
Two linear motors 3a, 3b that are interconnected by a support 6 are arranged on two
sides of the wafer table 10. On the support 6, a measuring head 7 is arranged,
which can thus be displaced in a linear motion during the measurement. The
measuring head 7 comprises a measuring device (not depicted) and a notch detector
20 that will be described in greater detail in connection with FIG 5 and 6.
On the table sector l0a, the wafer table 10 is provided with two annular support edges
13, 14, each of which is equipped with several adhesive strips 15a, 15b.
Thus, the claim does require a measuring table having a cup-shaped wafer table with a rotary
drive and a support edge with adhesive material, wherein an alignment device is arranged in the
interior of the wafer table and a displaceable measuring head is arranged over the wafer table to
thereby integrate a measuring device and a notch detector.
7
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