Appeal No. 2006-2344
Application No. 10/408,890
wafer table with a rotary drive and an edge support with adhesive material, wherein an
alignment device is arranged in the interior of the wafer table and a displaceable measuring head
is arranged over the wafer table to thereby integrate a measuring device and a notch detector.
Further, our review of the Pedersen reference indicates that Pedersen teaches perfluoroelastomer
as a type of adhesive that can be used to bond wafers in a wafer table. See column 9, lines 8-28.
One of ordinary skill in the art, at the time of the present invention, would have found that
Pedersen’s teaching complements the APA-Akimoto-Subramanian’s system to yield the claimed
a measuring system having a cup-like wafer table with adhesive lining for securing the wafer in
place as the drive rotates, wherein the adhesive is perfluoroelastomer. It is therefore our view,
after consideration of the record before us, that the evidence relied upon and the level of skill in
the particular art would have suggested to the ordinarily skilled artisan the invention as set forth
in claims 3 through 6 and 13 through 19. Accordingly, we will sustain the Examiner’s rejection
of claims 3 through 6 and 13 through 19.
CONCLUSION
In view of the foregoing discussion, we have sustained the Examiner’s decision rejecting
claims 1 through 20 under 35 U.S.C. § 103. Therefore, we affirm.
13
Page: Previous 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Next
Last modified: November 3, 2007