Appeal 2006-3124
Application 10/251,179
Fukuyama Figure 1 illustrates a vacuum chamber 1 in which the surface of a
sample 6 is etched with radicals and ions of the plasma 5. Etching uniformity
is controlled by adjusting the height of ring 11 via a displacement converting
member 12 by using a pulse motor 13. Fukuyama, p. 5.
The Examiner relies on Tanaka for a disclosure of height adjustment by
using relative rotational position of two rings. Answer 5 & 7. Figure 1 of
Tanaka is shown below.
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