Appeal 2006-2501
Application 10/104,468
being directed to a non-elected invention. We have jurisdiction pursuant to
35 U.S.C. § 6.
STATEMENT OF THE CASE
The subject matter on appeal is directed to an apparatus “for
delivering radio frequency (RF) power for process operations such as plasma
processing and RF induction heating” (Specification 1, ll. 23-25). Further
details of the appealed subject matter are recited in representative claims 1,
17, and 19 reproduced below:
1. An apparatus for inductively coupled RF power process
operations, the apparatus comprising:
a process chamber;
an RF power source; and
an RF power induction coil, the RF power induction coil
having substantially non-coplanar coil turns, at least one of the
coil turns comprising an electrically conductive sheet having a
large surface area, the coil being connected with the RF power
source so as to receive RF power, the large surface area being
oriented substantially perpendicularly to magnetic field lines
caused by RF current flow through the coil, the coil being
disposed so as to couple RF power to the chamber for the
process operations, the process chamber and the coil being
disposed so that the direction of RF power coupling is
substantially parallel to the axis of the coil.
17. An apparatus for inductively coupling RF power to a load,
the apparatus comprising:
an RF power source; and
an RF power induction coil, the RF power induction coil
having a plurality of coil turns, the coil turns comprising an
2
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