Appeal 2007-0127
Application 09/749,916
1 reactor, cost of the material, material erosion rate, and the like. (col. 2, ll. 21
2 - 25.)
3 23. Degner teaches that a plate most commonly is from 0.1 to 2 cm
4 thick (0.039 inch to 0.787 inch). (col. 4, ll. 32-33).
5 24. Degner teaches other plates from 0.3 to 1.0 cm thick (0.118 inch
6 to 0.393 inch). (col. 4, ll. 32-34).
7 25. Degner teaches a showerhead electrode which has apertures for
8 introduction of reactive gases. (col. 4, ll. 45-49).
9 26. Degner’s plate apertures are said to be laid out in a symmetrical
10 uniform, usually circular profile to enhance properties (col. 4, ll. 49-54).
11 27. Degner teaches laying the apertures in order to “minimize non-
12 uniformities in the thermal, electrical, and structural properties of the disc.”
13 (col. 4, ll. 53-54).
14 28. Degner describes a support frame bonded to the electrode plate.
15 (col. 4, ll. 66-67).
16 29. Degner’s support frame is said to have high thermal and electrical
17 conductivity and low impedence. (col. 5, ll. 6-11).
18 30. Degner’s support frame is described as being suitably made from
19 graphite. (col. 5, line 16).
20 31. Degner’s support frame, for circular electrodes, is an annular ring.
21 (col. 5, ll. 22-26).
22 32. Degner describes a confinement ring 92 (Answer, page 23, lines
23 1-2).
7
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