Appeal 2007-0908
Application 10/152,077
second rotational speed at the beginning of the drying step. Moreover, as in
claim 1, during an initial portion of the drying step, a drying gas is
introduced to the processing chamber while continuing to supply the surface
tension reducing agent into the gas atmosphere.
The Examiner relied on Bergman's additional teachings of multiple
rotating speeds to reject claim 47. (Answer at 5.) Christenson points out
that claim 47 requires a first rotating speed during the rinsing step and
changing to a second rotating speed during the initial portion of the drying
step, when drying gas and STRA gas are added to the processing chamber.
(Br. at 15; Reply Br. at 8.) According to Christenson, Bergman's teaching
relates only to rotating speeds during a drying process, which Ueno already
teaches. (Br. at 15.) Christenson argues that Bergman therefore adds
nothing to the teachings of Ueno and Yoneda, and concludes that the
Examiner's rejection should be reversed. The Examiner responded that
Bergman was relied on for its teachings that faster rotation speeds result in
faster drying. (Answer at 9.)
We agree with Christenson that Bergman's teachings of changing
rotational speeds do not relate rotational speeds during the rinsing step to
rotational speeds during the drying process, as required by claim 47. The
Examiner has not explained how or why the ordinary worker would have
modified Ueno in light of the teachings of Bergman to arrive at the process
steps required by claim 47. Accordingly the rejection of claim 47 is
REVERSED.
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