Appeal No. 1997-2016 Page 13
Application No. 08/196,126
APPENDIX
10. An apparatus for stacking a plurality of structured substrates to be
aligned with one another corresponding to structuring thereof and connected
undetachably to one another by bonding, with the substrates having
approximately same surface area and with at least one substrate being non-
transparent, said apparatus comprising:
a substrate handling device having spaced first and second working
areas;
first means for receiving and retaining a substrate in said first working
area of the handling means;
alignment means located in said first working area for supporting said
first receiving and retaining means, said alignment means comprising a
coordinate table having precision drive means for effecting displacement of said
first receiving and retaining means along three mutually perpendicular
coordinates for changing an actual position of the substrate supported in said first
receiving and retaining means for aligning the substrate;
microscope means provided in said first working area for imaging two
spatially separated alignment marks on the substrate supported in said first
receiving and retaining means;
second means located in said second working area for receiving and
retaining aligned substrates to be deposited one upon another;
means for transporting the substrates aligned in said first working area to
said second working area and for depositing the aligned substrates onto said
second receiving and retaining means one upon another in accordance with
alignment effected in said first working area; and
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