Appeal No. 2005-1011 Page 2
Application No. 09/921,588
BACKGROUND
The appellants' invention generally relate to a method and apparatus for
polishing a substrate in a chemical mechanical polishing system (specification, p. 1). A
copy of the claims under appeal is set forth in the appendix to the appellants' brief.
The prior art references of record relied upon by the examiner in rejecting the
appealed claims are:
Winebarger et al. (Winebarger) 5,433,650 July 18, 1995
Kimura et al. (Kimura) 5,679,063 Oct. 21, 1997
Nagahara et al. (Nagahara) 5,816,900 Oct. 6, 1998
Kennedy et al. (Kennedy) 6,139,406 Oct. 31, 2000
Claims 1 to 25, 30 to 33 and 35 to 39 stand rejected under 35 U.S.C. § 103 as
being unpatentable over Kimura in view of Nagahara.
Claims 26 and 27 stand rejected under 35 U.S.C. § 103 as being unpatentable
over Kimura in view of Nagahara as applied to claim 23 above, further in view of
Winebarger.
Claim 34 stands rejected under 35 U.S.C. § 103 as being unpatentable over
Kimura in view of Nagahara as applied to claim 31 above, further in view of Kennedy.
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