Appeal 2007-1269
Application 10/636,468
FINDINGS OF FACT
The record supports the following findings of fact (FF) by a
preponderance of the evidence.
1. Pasadyn describes a method for controlling a semiconductor
manufacturing process that uses pre-process and post-process
metrology data gathered by an integrated metrology tool. (Pasadyn
Abstract; col. 1, ll. 9-12.)
2. Pasadyn teaches that an integrated metrology tool may be
incorporated into the flow of semiconductor wafers 105 through a
processing tool 410. (Pasadyn col. 5, ll. 29-31.) The integrated
metrology tool 310 acquires pre-process and post-process metrology
data. (Pasadyn col. 5, ll. 45-46.) Also, the integrated metrology tool
310 may acquire metrology data from the processed semiconductor
wafers prior to, during, or immediately following a manufacturing
process. (Pasadyn col. 5, ll. 46-50.) Pasadyn teaches that:
In one embodiment, the integrated metrology tool
310 sends metrology data (real-time or near real-
time time data) to an integrated metrology data
storage unit 330. The integrated metrology data
storage unit 330 stores the metrology data such
that it can be retrieved by the system 300 for
further analysis during or after a manufacturing
process cycle.
(Pasadyn col. 5, ll. 52-55.)
3. Pasadyn teaches that "[d]ata from the integrated metrology tool 310
may also be sent to the metrology data analysis unit 460." (Pasadyn
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