Appeal 2007-1269
Application 10/636,468
performance drift when the process rate trend exceeds the limit level. (Br.
11; Reply Br. 6.) We do not agree.
The plain meaning of the claim term "trend" is "a general or
prevailing tendency or course." Webster's New World Dictionary Third
College Edition 1425 (1994). Therefore, the plain meaning of the claim
term "process rate trend" is the general or prevailing tendency or course of
the process rate.
Pasadyn teaches that data from an integrated metrology tool is
correlated to corresponding semiconductor wafers. (FF 3.) Pasadyn also
teaches that the pre-process and post-process data are analyzed to evaluate
the accuracy of the process being performed on the semiconductor wafers,
and that the data analysis results are used to modify the parameters that
control the process. (FF 4.)
Although Pasadyn does not explicitly teach computing a process rate
trend as part of the data analysis, this limitation would have required no
more than ordinary skill and common sense, and was within the level of
ordinary skill in the art as demonstrated by the teachings of Pasadyn and
Liu. Pasadyn teaches data comparison and analysis, and Liu teaches
computing a process rate. Pasadyn also teaches that a series of wafers are
processed in sequence. (FF 2.) As the wafers were processed in sequence, it
would have been common sense to also compute a process rate trend for the
wafers by tracking the process rate for each individual wafer in the
sequence.
Tracking the change in process rate over time as the wafers are
processed -- i.e., a process rate trend -- would be within the level of ordinary
skill in the art. We also agree with the Examiner that Pasadyn teaches
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