Appeal 2007-2494
Application 10/161,134
[8] Figure 2 depicts foot formation 30 at the upper surface 23 of the
silicon nitride layer 22 and is shown below:
{Figure 2 is said to show a fragment of a wafer during processing.}5
[9] The presence of foot formation 30 is said to shield the underlying
layers from removal, resulting in formation of laterally extending
portions 42 in the underlying layers (Specification at 7:13-8:13).
[10] Figure 3 depicts formation of lateral portions 42 which extend out to
opposing corners 43, 45 and is shown below:
{Figure 3 is said to show a fragment of a wafer during
processing subsequent to Figure 2.}
[11] According to Appellants' specification, foot formation 30 can be
alleviated, or even eliminated, by inserting an intervening "imagable-
5 The text in curly brackets following the Figures is provided to ensure
compliance with section 508 of the U.S. Rehabilitation Act for publication
of this Decision on the USPTO website pursuant to the Freedom of
Information Act. It is not part of the Decision.
5
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