Ex Parte DeBoer et al - Page 11

                Appeal 2007-2494                                                                              
                Application 10/161,134                                                                        
                      Other findings of fact are cited as necessary below.                                    
                III. Obviousness                                                                              
                      The ultimate determination of obviousness under 35 U.S.C. § 103 is a                    
                legal conclusion based on underlying findings of fact.  In re Kotzab, 217                     
                F.3d 1365, 1369, 55 USPQ2d 1313, 1316 (Fed. Cir. 2000).  The PTO has the                      
                initial burden of establishing a prima facie case of obviousness.  In re Fine,                
                837 F.2d 1071, 1074, 5 USPQ2d 1596, 1598 (Fed. Cir. 1988).  The PTO can                       
                satisfy this burden by showing some objective teaching in the prior art which                 
                would have led one of ordinary skill in the art to the invention claimed.                     
                Fine, 837 at 1074, 5 USPQ2d at 1598.  However, the suggestion to combine                      
                references must not be derived by hindsight from knowledge of the                             
                invention itself.  Gambro Lundia AB v. Baxter Healthcare Corp., 110 F.3d                      
                1573, 1578-79, 42 USPQ2d 1378, 1383 (Fed. Cir. 1997).  All limitations of                     
                the claimed invention must be taught or suggested by the prior art to                         
                establish obviousness. In re Royka, 490 F.2d 981, 985, 180 USPQ 580, 583                      
                (CCPA 1974).                                                                                  
                      Here, the Examiner concluded that it would have been obvious to one                     
                of ordinary skill in the art to use the polysilicon layer 10 layer of Su to form              
                the optical assist layer 16 of Mason because Su teaches that a polysilicon                    
                layer can be used to support a photoresist layer (FF 28-29).  However,                        
                Mason explicitly requires an optical assist layer 16 to be made of a                          
                transparent or semitransparent material that has a different refractive index                 
                from an underlying nitride layer 14 (FF 20).  The Examiner has made no                        
                factual findings establishing the optical properties, i.e., transparency or semi-             
                transparency, or refractive index of the polysilicon material disclosed by Su.                
                Rather, the Examiner finds that Su teaches a polysilicon layer 10 underlying                  

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