Ex parte MIYAZAWA et al. - Page 5

          Appeal No. 96-1805                                                          
          Application 08/200,432                                                      

          ordinary skill in the art and not from the appellants’                      
          disclosure.  See, for example, Uniroyal, Inc. v. Rudkin-Wiley               
          Corp., 837 F.2d 1044, 1052, 5 USPQ2d 1434, 1439 (Fed. Cir.),                
          cert. denied, 488 U.S. 825 (1988).                                          
               The appellants' claims all are directed to a method of wafer           
          bonding.  Each of the three independent method claims includes a            
          preamble which establishes the environment in which the method is           
          performed as including a chamber with a gas inlet and a gas                 
          outlet, means for holding a first wafer, means for holding a                
          second wafer and for moving it to the first wafer, and a pressure           
          application bar for contacting at least one of the wafers.  Among           
          the several method steps thereafter recited in all three of these           
          claims is that the space between the two wafers be filled with a            
          gas having a lower viscosity than air "before the start of                  
          sticking of surfaces of said wafers" (claims 1 and 13) and                  
          "before starting a sticking of surfaces of said wafers" (claim              
          4).  Claims 1 and 13 further require that a pressure of gas                 
          "below atmospheric pressure" be set between the two wafers                  
          applied "before starting a sticking of surfaces of said wafers."            
               All three independent claims stand rejected as being                   
          unpatentable over the combined teachings of the prior art                   
          admitted by the appellants plus Wells, Hoshi and Black, with or             


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