Appeal No. 96-1805 Application 08/200,432 that the space between the wafers be filled with a gas of viscosity less than that of air prior to the start of sticking of the wafers, it does not also require the reduced pressure environment. However, as expressed above with regard to the other independent claims, it is our view that the combined teachings of the references fail to establish a prima facie case of obviousness with regard to the requirement of filling the space between the wafers with a gas having a lower viscosity than air, on its own. This being the case, we will not sustain the rejection of claim 4 or of dependent claim 5. The teachings of Haisma, cited against some of the dependent claims, also have been considered, but do not overcome the deficiencies discussed above. 14Page: Previous 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 NextLast modified: November 3, 2007