Ex parte MIYAZAWA et al. - Page 14




          Appeal No. 96-1805                                                          
          Application 08/200,432                                                      


          that the space between the wafers be filled with a gas of                   
          viscosity less than that of air prior to the start of sticking of           
          the wafers, it does not also require the reduced pressure                   
          environment.  However, as expressed above with regard to the                
          other independent claims, it is our view that the combined                  
          teachings of the references fail to establish a prima facie case            
          of obviousness with regard to the requirement of filling the                
          space between the wafers with a gas having a lower viscosity than           
          air, on its own.  This being the case, we will not sustain the              
          rejection of claim 4 or of dependent claim 5.                               
               The teachings of Haisma, cited against some of the dependent           
          claims, also have been considered, but do not overcome the                  
          deficiencies discussed above.                                               
















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