Ex parte EKLUND et al. - Page 6




          Appeal No. 1998-0077                                                        
          Application No. 08/247,910                                                  


          subsequently etching the polysilicon layer to form a resistor               
          that includes the resistor body and at least two contact                    
          portions abutting the resistor body, as claimed in Appellants'              
          claim 21.  Appellants further argue that Ning, Hanagasaki,                  
          Winnerl et al., and Brower fail to teach, subsequent to the                 
          step of removing a portion of the first insulating layer,                   
          patterning and etching the polysilicon layer to define first                
          and second contact portions abutting the resistor body and                  
          simultaneously forming at least one polysilicon element of a                
          second electronic device, as claimed in Appellants' claim 22.               
          Appellants argue that Ning, Hanagasaki, Winnerl et al., and                 
          Brower fail to teach a second doping step of doping the                     
          contact portions of the polysilicon resistor prior to                       
          patterning and etching the polysilicon layer, as claimed in                 
          claims 26 and 34.  Finally, Appellants argue that Ning,                     
          Hanagasaki, Winnerl et al., and Brower fail to teach the step               
          of doping both n-type and p-type impurities, as claimed in                  
          claim 31.                                                                   
               In the answer, the Examiner argues at pages 3 to 5 that                
          the prior art teaches the claimed method and that the                       
          combination of Ning, Hanagasaki, Winnerl et al., and Brower is              
                                          6                                           





Page:  Previous  1  2  3  4  5  6  7  8  9  10  11  12  13  14  Next 

Last modified: November 3, 2007