Appeal No. 2005-0323 Page 14
Application No. 09/577,835
metal silicide layer such as cobalt silicide, titanium silicide
and platinum silicide." According to the examiner, the
modification would have been obvious because the conductive
barrier layer would prevent diffusion of silicon atoms into the
polysilicon layer into the silicide layer. From our review of
Bai, we are in agreement with the examiner's position. From the
complete lack of any arguments as to claim 28 by appellants, we
are not persuaded of any error on the part of the examiner.
Accordingly, the rejection of claim 28 under 35 U.S.C. § 103(a)
is affirmed. As claim 29 falls with claim 28, the rejection of
claim 29 is affirmed.
CONCLUSION
To summarize, the decision of the examiner to reject claims
25-30 under 35 U.S.C. § 103(a) is affirmed.
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