Appeal No. 2001-2455
Application 08/439,490
Claims 1, 14, 16, 26, 40 and 41 are representative of
the subject matter on appeal and are reproduced below:
1. A replaceable sputtering target comprising:
a circular target unit that is formed at least in
part of a volume of sputtering material, the unit having a
forward facing front sputtering face of the sputtering material
and a rearward facing rear face having a water impermeable
cooling surface lying in an annular area thereon around a center;
a recessed peripheral rim having:
a forward facing annular front edge having a
vacuum-sealing surface thereon surrounding the front
sputtering face, the front edge being spaced rearwardly
of the forward face of the target unit, and
a rearward facing annular rear edge having an
outer water-sealing surface thereon surrounding the
rear face of the target unit;
tension maintaining support structure fixed at the
center on the rear face, and
the rear face having an annular inner water-
sealing surface thereon surrounding the tension maintaining
support structure.
14. A removable sputtering target assembly comprising:
a replaceable target unit formed at least in part of a
volume of sputtering material, the unit having a forward facing
front sputtering face of the sputtering material and a rearward
facing rear face having a water impermeable cooling surface lying
in an area thereon;
the target unit having a forward facing front
peripheral edge having a vacuum-seal surface thereon surrounding
2
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