Appeal No. 2001-2455
Application 08/439,490
Claim 40
Claim 40 recites a replaceable sputtering target which
comprises a circular target unit and recessed peripheral rim
including a tension maintaining support structure fixed at the
center of the rear face thereof, the rear face having an annular
inner water-sealing surface thereon surrounding the tension
maintaining support structure. For the reasons set forth above
in connection with Claim 1, the examiner has failed to establish
why one of ordinary skill in the art would have been motivated to
have modified the primary references in light of the teachings of
the secondary references to achieve these claimed features.
Claim 41
Claim 41 is directed to a method of replacing a
sputtering target in a sputtering apparatus which includes the
step of disconnecting a used target from the cathode assembly of
the apparatus by removing the used target with a cooling jacket.
As discussed above, none of the cited references disclose or
suggest an apparatus wherein the cooling jacket is removable
along with the target.
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