Appeal No. 2001-2455
Application 08/439,490
cooling jacket, connected to the back thereof, is also removable.
Schuhmacher discloses an apparatus wherein the cooling channel is
positioned between a diaphragm and the base. The target is
connected to the base by means which are separate from the
means for connecting the diaphragm to the base. See column 3,
lines 34-39. Thus, while it is indicated that the target is
removable, there is no indication that an assembly comprising
both the target and cooling jacket are removable as required by
claim 14. Likewise, there is no disclosure or suggestion in
Kerschbaumer of a removable assembly comprising the target unit
and cooling jacket.
Claims 16 and 26
Claim 16 is directed to a sputtering cathode assembly
and claim 26 is directed to a sputtering apparatus which includes
a sputtering cathode assembly. The sputtering cathode assemblies
of claims 16 and 26 include target assemblies removably connected
to a housing, the assemblies including a replaceable target and a
cooling jacket. For the reasons set forth above with respect to
claim 14, the cited references fail to disclose or suggest
apparatuses wherein the target unit and cooling jacket are
removable.
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