Appeal No. 2001-2455
Application 08/439,490
41. A method of replacing a sputtering target in a
sputtering apparatus comprising the steps of:
disconnecting a used target from the cathode assembly
of the apparatus by removing the used target with a cooling
jacket containing a cooling fluid cavity attached to the back of
the target with the back face of the used target forming a
surface of the cavity;
then, separating the used target from the cooling
jacket, replacing the used target with a new target, connecting
the new target to the cooling jacket with the cooling fluid
cavity in contact with the back face of the new target;
then, connecting the new target to the cathode assembly
of the apparatus.
The references relied upon by the examiner are:
Urbanek et al. (Urbanek) 3,741,886 June 26, 1973
Landau 4,407,708 Oct. 4, 1983
Henderson et al. (Henderson) 5,240,580 Aug. 31, 1993
Demaray et al. (Demaray) 5,252,194 Oct. 12, 1993
Kerschbaumer 5,259,894 Dec. 14, 1993
Schuhmacher et al. (Schuhmacher) 5,421,978 June 6, 1995
(filed Dec. 28, 1993)
GROUNDS OF REJECTION
1. Claims 1-26 and 29-41 stand rejected under
35 U.S.C. § 103 as unpatentable over Landau in view of Urbanek
and Demaray.
2. Claims 1-26 and 29-41 stand rejected under
6
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