Appeal No. 2001-2455
Application 08/439,490
the front sputtering face and a rearward facing rear edge having
a water-seal surface thereon surrounding the rear face of the
unit; and
a cooling jacket connected to the back of the target
unit and having a forward facing peripheral edge having a water-
seal surface thereon in water sealing engagement with the water-
sealing surface on the rearward facing edge of the target unit so
as to enclose a cooling water cavity between the cooling jacket
and the cooling surface, the cooling jacket having cooling water
ports therein communicating with the cooling water cavity.
16. A sputtering cathode assembly comprising:
a housing;
a plasma shaping and confining magnet assembly carried
by the housing;
a target assembly removably connected to the housing,
the target assembly including:
a replaceable target unit having a back and formed
at least in part of a volume of sputtering material
having a front sputtering face thereon, and
a cooling jacket connected in water-sealing
relationship to the back of the target unit to enclose
a cooling water cavity between the cooling jacket and
the target unit, the cooling jacket having cooling
water ports therein communicating with the cooling
water cavity, the target unit having a rear face
positioned to be in direct cooling contact with flowing
cooling water within the cavity, the cooling jacket
configured to protectively isolate the magnet assembly
from cooling water in the cavity; and
a supply of flowing cooling water detachably
connectable to the cooling water ports upon the
removable connection of the target assembly to the
housing.
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