Appeal 2007-0908
Application 10/152,077
[3b] during at least an initial portion of the drying step
with the device rotating at the drying rotational
speed,
[3b1] directing a drying gas into the processing
chamber
while also
[3b2] continuing to supply the surface tension
reducing agent into the gas atmosphere
within the processing chamber.
(Br. App'x; square bracketed labels, indentation, and subparagraphing
added.)
Claims 2-5, 8, 9, 11, 45, and 46 depend from claim 1; claim 10
depends from claim 9; claim 47 is independent.
Claim 8 requires that the device be mounted on a turntable that moves
the device past separate orifices that introduce gaseous isopropyl alcohol
("IPA") and water, respectively, to the device surface.
Claim 47 is similar to claim 1, but recites a first rotational speed for
the substrate during the spraying of the rinse and a second rotational speed
for the substrate at the beginning of the drying step, wherein during an initial
portion of the drying step, a drying gas is introduced to the processing
chamber while continuing to supply the surface tension reducing agent into
the gas atmosphere.
3
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