Appeal 2007-0908
Application 10/152,077
7. According to the Specification, the surface tension reducing agent is
preferably "at least to some degree miscible with the rinsing fluid" and is
preferably isopropyl alcohol ("IPA"). (Specification at 9:9-15.)
8. The Specification indicates that "the amount of the surface tension
reducing agent in a carrier gas can be any useful amount . . . [p]referably . . .
less than an amount that would cause undesired condensation of the agent
out of its gaseous phases during processing." (Specification at 9:25-31.)
9. According to the Specification, a preferred turntable speed for the
rinsing step can be from about 5 to 500 rpm. (Specification at 20:29-31.)
Drying
10. The Specification describes a preferred method wherein the rinsing
step is followed by a step "wherein the device is at least partially dried in an
atmosphere comprising a surface tension reducing agent." (Specification
at 3:19-20.)
11. In the words of the Specification, drying:
can be accomplished using known methods and materials.
Drying can incorporate motion of a substrate, e.g., spinning or
rotating . . . ; exposure to energy or elevated temperature;
exposure to a dry gas such as nitrogen, exposure to organic
materials, e.g., a surface tension reducing agent . . . or a
combination of these.
(Specification at 12:24-28.)
12. According to the Specification:
In a particularly preferred embodiment of the invention, the
surface tension reducing agent of the rinsing step comprises a
flow of surface tension reducing agent continued from the end
of the rinsing step, maintained through the beginning of the
drying step, and through at least partial drying of the substrate.
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