Appeal 2007-0908
Application 10/152,077
In essence, a continuous flow of surface tension reducing agent
overlaps at least a portion of both the rinsing step and the
drying step, e.g., the flow of surface tension reducing agent
stretches continuously through at least the end portion of the
rinse and the beginning portion of the drying step.
(Specification at 13:5-11.)
13. The Specification states that as a preferred drying gas, "[n]itrogen
may be introduced separately or may be supplied solely in the form of the
carrier gas for the surface tension reducing agent." (Specification
at 26:21-22.)
14. The Specification does not recommend a general range of rotation
speeds for the turntable during the drying operation, but indicates that
rotation speed is one of several variables that can be adjusted depending on
the particular circumstances. (Specification at 26:22-25.)
15. In a particular, non-limiting example, a substrate is etched, subjected
to a high flow rinse, with 2% or 6% IPA by volume in nitrogen, then a low
flow rinse at a turntable speed of 20 to 45 rpm, followed by purges of the
water lines, including the central spray column, with continued dispensing of
IPA in nitrogen throughout. (Specification at 29:4 through 30:24.)
16. Next:
[a] final dry was accomplished by termination of all flows
except for the isopropyl alcohol vapor in nitrogen from the
recirculation orifice . . . The turntable was rotated at a speed of
500 rpm, and the process lasted for 30 seconds with flow of
isopropyl alcohol vapor and nitrogen, followed by six minutes
of only dry nitrogen gas.
(Specification at 30:25-29.)
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